KLA KLA 5105 Precision Metrology Module

KLA KLA 5105 Precision Metrology Module

    The KLA KLA 5105 is a high-precision metrology solution designed for advanced semiconductor manufacturing processes. It provides accurate measurement capabilities essential for quality control in semiconductor fabrication.

Manufacturer:KLA Corporation

Model:KLA 5105

Module Type:High Precision Measurement

Measurement Range:± 0.01 nm

Resolution:0.001 nm

Accuracy:± 0.005 nm

Repeatability:± 0.002 nm

Operating Voltage:24 VDC ± 10%

Operating Temperature Range:-20°C to +60°C

Weight:2.5 kg

Dimensions:30 cm x 20 cm x 10 cm

    The KLA KLA 5105 is a cutting-edge measurement module specifically designed for the semiconductor industry. Its precision engineering ensures accurate and reliable measurements under various environmental conditions, making it an indispensable tool for modern industrial operations. Built with robust materials, this module can withstand harsh environments, including exposure to dust and water, thanks to its IP67 rating. The module comes equipped with multiple interfaces including Ethernet and RS-232/RS-485, allowing seamless integration with existing systems. With a power consumption of only 100W, it is energy-efficient, helping reduce operational costs. The KLA KLA 5105 meets stringent safety standards, certified by CE and RoHS, ensuring safe and compliant operation. Whether you are involved in semiconductor manufacturing or other precision industrial applications, the KLA KLA 5105 offers unmatched performance and reliability.